All features of the FMA6600 and FMA6700 Series flow meters can be accessed via the local four
button keypad and LCD. The digital interface operates via RS485 (optional RS-232 available) and
provides access to applicable internal data including: flow, temperature, pressure reading, auto
zero, totalizer and alarms settings, gas table, conversion factors and engineering units selection,
dynamic response compensation and linearization table adjustment. The analog interface provides
0 to 5 Vdc or 0 to 10 Vdc or 4 to 20 mA outputs for flow, pressure and temperature (jumper
selectable). Auto Zero
The FMA6600 and FMA6700 Series supports automatic sensor zero offset adjustment that can be activated
locally via keypad or remotely via digital interface. The auto zero feature requires absolutely no
flow through the meter during auto zero process. Provisions are made to either start, stop or save
the current auto zero value via digital commands. Totalizer
The total volume of the gas is calculated by integrating the actual gas flow rate with respect to time.
Both keypad menu and digital interface commands are provided to: • set the totalizer to ZERO • start
the totalizer at a preset flow • assign action at a preset total volume • start/stop totalizing the flow
• read totalizer Totalizer conditions become true, when the totalizer reading and the "Stop at Total"
volumes are equal. Flow Alarm
High and Low gas flow ALARM limits can be preprogrammed via keypad or remotely via digital interface.
ALARM conditions become true when the current flow reading is equal or higher/lower than corresponding
values of high and low alarm levels. Alarm action can be assigned with preset delay interval (0-3600
seconds) to activate the contact closer (separate for High and Low alarm). Pressure Alarm (FMA6700
Series) High and Low gas pressure ALARM limits can be preprogrammed via keypad or remotely via digital
interface. Pressure alarm conditions become true when the current pressure reading is equal or higher
than corresponding values of high pressure alarm settings or equal or lower than corresponding values of
low pressure alarm settings. Alarm action can be assigned to activate the contact closer (separate for
High and Low pressure alarm). Temperature Alarm (FMA6700 Series) High and Low gas temperature
ALARM limits can be preprogrammed via keypad or remotely via digital interface. Temperature alarm
conditions become true when the current temperature reading is equal or higher than corresponding
values of high temperature alarm settings or equal or lower than corresponding values of low
temperature alarm settings. Alarm action can be assigned to activate the contact closer (separate for
High and Low temperature alarm). Engineering Units
The flow set points, measured gas flow and associated totalizer data are scaled directly in engineering
units via the front panel keypad or digital interface. The following units of measure are supported:
%F.S., L/min, L/h, mL/min, mL/h, SCFH, SCFM, LbPH, LbPM, User Defined EU. Multi-Gas Calibration
The FMA6600 Series is capable of storing primary calibration data for up to 10 gases. This feature allows
the same FMA6600 Series to be calibrated for multiple gases while maintaining the rated accuracy on
each. Standard 10-Point NIST Calibration
Optional up to 9 additional 10-point calibration may be ordered at an additional charge per gas. Conversion Factors
Conversion factors for up to 32 gases are stored in the FMA6600 and FMA 6700 Series. In addition, the
provision is made for a user defined conversion factor. Conversion factors may be applied to any of
the ten gas calibrations via keypad or digital interface commands. Contact Closure
Two sets of dry contact relay outputs are provided to actuate user supplied equipment. These are
programmable via local keypad or digital interface such that the relays can be made to switch when a
specified event occurs (e.g. when a low or high flow, pressure or temperature alarm limit is exceeded
or when the totalizer reaches a specified value). Leak Integrity
1 x 10-9 sccs of Helium maximum to the outside environment.
FMA6600/FMA6700 Transducers should not be used for monitoring Oxygen gas unless specifically cleaned and prepared for such application. See below for ordering details.
SPECIFICATIONS Accuracy: FMA6700: ±1% of FS including linearity [0 to 50°C and 0.35 to 6.8 bar (5 to 100 psia)] FMA6600: ±1% of FS at calibration conditions [101 KPa (14.7 psia) and 21.1°C (70°F)] Pressure Range: 0 to 6.8 bar (100 psig) (measurement) Pressure Accuracy: ±1% of FS Temperature Range: 0 to 50°C (measurement) Temperature Accuracy: ±1°C Repeatability: ±0.15% of full scale Response Time: Units up to 10 LPM @1.0 second, units greater than 10 LPM @2 seconds to within ±2% of setpoint over 25% to 100% of full scale Temp. Coefficient: 0.15% of full scale/°C or better Pressure Coefficient: 0.01% of full scale/psi (0.07 bar) or better Max Gas Pressure: 6.8 bar (100 psig) Max Burst Pressure: 13.6 bar (200 psig) Max Pressure Drop: 8 psi (at 100 L/min flow) Gas & Ambient Temp: 5 to 50°C (41 to 122°F) Output Signals: Linear 0 to 5 Vdc (3000 Ω min load impedance); 0 to 10 Vdc (6000 Ω min impedance); 4 to 20 mA optional (500 . max loop resistance). Maximum noise 20 mV peak to peak. Input Power: Is available to run at three different voltages: ±15Vdc (±200 mA maximum) or +12Vdc (300 mA maximum) standard; +24Vdc (250 mA maximum) optional (-24VDC); Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection. Materials in Fluid Contact: 316 stainless steel, FKM O-rings. EPDM or Perfluoroelastomer O-rings optional Connections: Models ≥15 LPM: Standard 1/4" compression fittings Models 20 to 50 LPM: Standard 1/4" compression fittings Models 60 to 100 LPM: Standard 3/8" compression fittings Display: 128 x 64 graphic LCD with backlight (up to 8 lines of text) Calibration: Standard one 10 points NIST calibration. Optional up to 9 additional calibrations may be ordered for an additional charge per gas. CE Compliance: EN 55011 class 1, class B; EN50082-1 Environmental (per IEC 664): Installation Level II; Pollution Degree II Approximate Shipping Weights: Models up to 15 SLPM: 1.68 kg (3.7 lb) Models from 20 to 100 LPM: 1.97 kg (4.34 lb)
† All amounts shown in USD Note: Comes complete with operator’s manual and NIST traceable certificate for Nitrogen. Power supply sold separately.
Note: Flow rates are stated for Nitrogen at STP conditions (21.1°C (70°F) at 1 atm).
For 12Vdc power, add suffix "-12VDC" to model number; add $100 to price.
For 24Vdc power, add suffix "-24VDC" to model number; add $200 to price.
For perfloroelastomer, Buna or EPR o-rings, VCR fittings, or RS232 communications, consult Flow Engineering for a quote.
For each additional calibration add -(*) to the part number and $300.00 to the cost.
Calibrations done at ambient temperature only.
For Oxygen cleaned units, add suffix "-C" to the model number; add $125 to price.
(OPTIONS SHOWN IN THIS "NOTE" ABOVE ARE PRICED IN US$)
Model Type select from: 66 for Flowmeter 67 for Flow/Pressure/Temperature meter
Range (N2) select from: 01 for 10 SCCM 02 for 20 SCCM 03 for 50 SCCM 04 for 100 SCCM 05 for 200 SCCM 06 for 500 SCCM 07 for 1 SLM 08 for 2 SLM 09 for 5 SLM 10 for 10 SLM 11 for 15 SLM 12 for 20 SLM 13 for 30 SLM 14 for 40 SLM 15 for 50 SLM 16 for 60 SLM 17 for 80 SLM 18 for 100 SLM
Options select from: Nothing(leave field blank) for no options (standard unit) -I for 4 to 20 mA output (replaces std 0 to 5 V) -12V for 12 Vdc power -24V for 24 Vdc power -K for Perfluoroelastomer o-rings -B for Buna o-rings -E for EPR o-rings -VCR for VCR fittings -RS232 for RS232 communications (replaces std RS485)
Note: All combinations may not be valid, check spec sheet for valid part numbers.
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